Open AccessBuckling characteristics of SiGe layers on viscous oxide
Author(s) -
C.-Y. Yu,
C.-J. Lee,
ChinYun Lee,
J.-T. Lee,
M.-H. Liao,
C. W. Liu
Publication year - 2006
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.2345047
Subject(s) - buckling , materials science , oxide , wafer , amplitude , thermal oxidation , composite material , condensed matter physics , nanotechnology , metallurgy , optics , physics
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