Open AccessDetermination of the d31 piezoelectric coefficient of PbZrxTi1−xO3 thin films using multilayer buckled micromembranes
Author(s) -
Cédric Ayela,
Liviu Nicu,
Caroline Soyer,
Éric Cattan,
Christian Bergaud
Publication year - 2006
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.2338139
Subject(s) - piezoelectricity , materials science , microscale chemistry , piezoelectric coefficient , thin film , transverse plane , voltage , buckling , silicon , optoelectronics , composite material , nanotechnology , electrical engineering , structural engineering , mathematics education , mathematics , engineering
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