Open AccessPhase field modeling of excimer laser crystallization of thin silicon films on amorphous substrates
Author(s) -
ChihJen Shih,
Chun Fang,
Chun-Ti Lu,
M. H. Wang,
M. H. Lee,
C.W. Lan
Publication year - 2006
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.2245193
Subject(s) - materials science , silicon , crystallization , nucleation , amorphous silicon , substrate (aquarium) , excimer laser , thin film , optoelectronics , phase (matter) , amorphous solid , laser , optics , crystalline silicon , nanotechnology , thermodynamics , crystallography , chemistry , oceanography , physics , organic chemistry , geology
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