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Determination of rotational and vibrational temperatures of a nitrogen helicon plasma
Author(s) -
Costel Biloiu,
Xuan Sun,
Zane Harvey,
Earl Scime
Publication year - 2006
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.2219392
Subject(s) - helicon , rotational–vibrational spectroscopy , vibrational temperature , atomic physics , plasma , rotational temperature , nitrogen , materials science , spectral line , boltzmann constant , kinetic energy , physics , excited state , thermodynamics , quantum mechanics , astronomy
We present a method of rotational and vibrational temperature estimation in nitrogen plasma by simulation of the emission spectrum of the first positive system (BΠg3→AΣu+3) of nitrogen. The gas kinetic temperature, assumed to be in equilibrium with the rotational temperature, was obtained from a fit to the experimentally obtained 0→0 at 1051nm, 1→0 at 872.23nm, and 2→0 at 775.32nm rovibrational band spectra. Excellent agreement between values inferred from each band [(499±29)K] as well as inferred by using the 3→0 band peak ratio method [(473±25)K] was obtained for a 600W, 850G, and 10mTorr helicon N2 plasma. The vibrational temperature was determined from a Boltzmann plot of the integrated band intensities [(6040±225)K] and by numerical fit to the Δv=+1, +2, and +3 sequences after accounting for Franck-Condon factors and electronic-vibrational transition moments [(6200±400)K].

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