High-mobility electronic transport in ZnO thin films
Author(s) -
Atsushi Tsukazaki,
Akira Ohtomo,
M. Kawasaki
Publication year - 2006
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.2193727
Subject(s) - molecular beam epitaxy , thin film , materials science , electron mobility , hall effect , epitaxy , oxygen , oxygen pressure , wide bandgap semiconductor , pulsed laser deposition , optoelectronics , analytical chemistry (journal) , electrical resistivity and conductivity , chemistry , nanotechnology , layer (electronics) , engineering , organic chemistry , chromatography , electrical engineering
A systematic study of electronic transport properties was carried out for ZnO thin films grown on high-temperature annealed buffer layers of semi-insulating Mg0.15Zn0.85O. As functions of growth temperature and oxygen pressure during laser molecular-beam epitaxy growth, there can be seen optimum growth conditions where gross concentration of intrinsic defects is thought to be reduced. For the best qualified film, Hall mobilities of 5000cm2V−1s−1 at 100K and 440cm2V−1s−1 at 300K were recorded with the residual electron densities of 4×1014 and 9×1015cm−3, respectively.
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