Fabrication and characterization of solid-state nanopores using a field emission scanning electron microscope | Zendy

Hung Chang | Zendy; Samir M. Iqbal | Zendy; Eric A. Stach | Zendy; Alexander H. King | Zendy; Nestor J. Zaluzec | Zendy; Rashid Bashir | Zendy

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Fabrication and characterization of solid-state nanopores using a field emission scanning electron microscope

Author(s) -

Hung Chang,

Samir M. Iqbal,

Eric A. Stach,

Alexander H. King,

Nestor J. Zaluzec,

Rashid Bashir

Publication year - 2006

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.2179131

Subject(s) - nanopore , materials science , scanning electron microscope , field electron emission , transmission electron microscopy , field emission microscopy , silicon , nanotechnology , fabrication , environmental scanning electron microscope , shrinkage , characterization (materials science) , electron beam induced deposition , analytical chemistry (journal) , scanning transmission electron microscopy , electron , optoelectronics , composite material , optics , chemistry , diffraction , medicine , physics , alternative medicine , pathology , quantum mechanics , chromatography

The fabrication of solid-state nanopores using the electron beam of a transmission electron microscope (TEM) has been reported in the past. Here, we report a similar method to fabricate solid-state nanopores using the electron source of a conventional field-emission scanning electron microscope (FESEM) instead. Micromachining was used to create initial pore diameters between 50nm and 200nm, and controlled pore shrinking to sub 10nm diameters was performed subsequently during in situ processing in the FESEM. Noticeably, different shrinking behavior was observed when using irradiation from the electron source of the FESEM than the TEM. Unlike previous reports of TEM mediated pore shrinkage, the mechanism of pore shrinkage when using the FESEM could be a result of surface defects generated by radiolysis and subsequent motion of silicon atoms to the pore periphery.

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