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Dopant source choice for formation of p-type ZnO: Li acceptor
Author(s) -
Y. J. Zeng,
Z. Z. Ye,
Wan Xu,
Dongyang Li,
Jianguo Lü,
Li Zhu,
Binghui Zhao
Publication year - 2006
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.2172743
Subject(s) - homojunction , materials science , dopant , doping , thin film , substrate (aquarium) , hall effect , sputter deposition , acceptor , optoelectronics , layer (electronics) , analytical chemistry (journal) , electrical resistivity and conductivity , sputtering , wide bandgap semiconductor , nanotechnology , chemistry , condensed matter physics , electrical engineering , physics , oceanography , engineering , chromatography , geology
Li-doped, p-type ZnO thin films have been realized via dc reactive magnetron sputtering. An optimized result with a resistivity of 16.4 Omega cm, Hall mobility of 2.65 cm(2)/V s, and hole concentration of 1.44x10(17) cm(-3) was achieved, and electrically stable over a month. Hall-effect measurements supported by secondary ion mass spectroscopy indicated that the substrate temperature played a key role in optimizing the p-type conduction of Li-doped ZnO thin films. Furthermore, ZnO-based p-n homojunction was fabricated by deposition of a Li-doped p-type ZnO layer on an Al-doped n-type ZnO layer. (c) 2006 American Institute of Physics.status: publishe

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