Open AccessAccuracy and Repeatability of X-Ray Metrology
Author(s) -
D. Keith Bowen
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2063026
Subject(s) - metrology , repeatability , throughput , calibration , wafer , materials science , optics , critical dimension , measurement uncertainty , computer science , optoelectronics , physics , telecommunications , quantum mechanics , wireless , chemistry , chromatography
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