Open AccessToF-SIMS Applications in Microelectronics: Quantification of Organic Surface Contamination
Author(s) -
C. Trouiller
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2063022
Subject(s) - contamination , wafer , microelectronics , thermal desorption , analytical chemistry (journal) , secondary ion mass spectrometry , mass spectrometry , silicon , desorption , materials science , spectroscopy , chemistry , environmental chemistry , chromatography , nanotechnology , optoelectronics , organic chemistry , adsorption , quantum mechanics , biology , ecology , physics
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