Open AccessQuantitative Analysis of 1D Ultra-Shallow Junctions Using Off-Axis Electron Holography
Author(s) -
Martha McCartney,
MyungGeun Han,
Jing Li,
Peter Fejes,
Qianghua Xie,
G. Tam,
S. Bagchi,
B. Taylor,
J. Conner
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2063019
Subject(s) - electron holography , dopant , materials science , holography , optoelectronics , nanometre , electron , doping , image resolution , nanoscopic scale , silicon , polishing , digital holography , secondary ion mass spectrometry , resolution (logic) , ion , nanotechnology , optics , chemistry , physics , computer science , quantum mechanics , artificial intelligence , transmission electron microscopy , composite material , organic chemistry
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