Open AccessThe Aberration Corrected SEM
Author(s) -
David C. Joy
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2063015
Subject(s) - lens (geology) , optics , aperture (computer memory) , optical aberration , image resolution , numerical aperture , spherical aberration , materials science , resolution (logic) , reduction (mathematics) , computer science , physics , artificial intelligence , acoustics , wavefront , wavelength , geometry , mathematics
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