Open AccessOptical and X-ray Metrology of Low-k Materials: Porosity
Author(s) -
Hugo Celio
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2063014
Subject(s) - metrology , porosity , materials science , dielectric , compatibility (geochemistry) , porous medium , optoelectronics , interconnection , near infrared spectroscopy , composite material , process engineering , optics , computer science , telecommunications , physics , engineering
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