Open AccessSynthesis of Cubic Boron Nitride Thin Films on Silicon Substrate Using Electron Beam Evaporation
Author(s) -
S. Nasrazadani
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2063010
Subject(s) - boron nitride , materials science , x ray photoelectron spectroscopy , fourier transform infrared spectroscopy , substrate (aquarium) , analytical chemistry (journal) , electron beam physical vapor deposition , scanning electron microscope , evaporation , thin film , silicon , boron , spectroscopy , chemical engineering , optoelectronics , nanotechnology , composite material , chemistry , physics , oceanography , chromatography , geology , engineering , thermodynamics , organic chemistry , quantum mechanics
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