Open AccessFiber-optics Low-coherence Integrated Metrology for In-Situ Non-contact Characterization of Novel Materials and Structures
Author(s) -
W. J. Walecki
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2062986
Subject(s) - metrology , interferometry , materials science , coherence (philosophical gambling strategy) , optics , characterization (materials science) , wafer , optical fiber , optoelectronics , nanotechnology , physics , quantum mechanics
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