Open AccessNoninvasive Monitoring of Ion Energy in an Inductively Coupled Plasma Reactor
Author(s) -
Mark A. Sobolewski
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2062982
Subject(s) - ion , voltage , ion current , inductively coupled plasma , plasma , materials science , capacitive sensing , current (fluid) , nuclear engineering , analytical chemistry (journal) , chemistry , electrical engineering , physics , engineering , quantum mechanics , organic chemistry , chromatography
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