Open AccessOptical Metrology Performance Analysis: Approach and Metrics
Author(s) -
Leo Asinovski
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2062981
Subject(s) - metrology , computer science , monte carlo method , repeatability , process (computing) , covariance , measurement uncertainty , system of measurement , reliability engineering , range (aeronautics) , function (biology) , engineering , mathematics , statistics , physics , astronomy , evolutionary biology , biology , aerospace engineering , operating system
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