Open AccessOn the spatial resolution of scanning spreading resistance microscopy : experimental assessment and electro-mechanical modeling
Author(s) -
Pierre Eyben
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2062974
Subject(s) - spreading resistance profiling , image resolution , materials science , resolution (logic) , microscopy , radius , characterization (materials science) , scanning probe microscopy , atomic force microscopy , optics , nanotechnology , optoelectronics , silicon , physics , computer science , computer security , artificial intelligence
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