Open AccessNon-destructive Characterizing of Lateral Doping Effects
Author(s) -
P. Borden
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2062973
Subject(s) - materials science , doping , wafer , optics , lateral diffusion , spreading resistance profiling , bar (unit) , optoelectronics , diffusion , beam (structure) , laser , chemistry , geology , biochemistry , oceanography , physics , membrane , thermodynamics
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