Open AccessAdvantages of Non-Contact Measurements of Sheet Resistance Together with Leakage Current for USJ Characterization
Author(s) -
Vladimir Faifer
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2062972
Subject(s) - materials science , leakage (economics) , sheet resistance , optoelectronics , wafer , doping , contact resistance , diode , fabrication , equivalent series resistance , saturation current , voltage , electrical engineering , composite material , pathology , economics , macroeconomics , engineering , medicine , alternative medicine , layer (electronics)
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