Open AccessSelf-calibrating Approach for Non-Contact Electrical Doping Profiling
Author(s) -
Dmitriy Marinskiy
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2062971
Subject(s) - surface photovoltage , wafer , depletion region , doping , materials science , capacitance , optoelectronics , calibration , silicon , dopant , voltage , analytical chemistry (journal) , electrical engineering , chemistry , semiconductor , physics , electrode , engineering , spectroscopy , quantum mechanics , chromatography
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