Open AccessControlling Environmental Effects on Optical Measurements of Gate Dielectric Thickness
Author(s) -
U Elisa
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2062948
Subject(s) - dielectric , materials science , gate dielectric , optoelectronics , ellipsometry , desorption , monolayer , layer (electronics) , metrology , humidity , nanotechnology , thin film , optics , electrical engineering , transistor , adsorption , chemistry , physics , organic chemistry , voltage , thermodynamics , engineering
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