X-ray Photoelectron Spectroscopy of High-κ Dielectrics
Author(s) -
A. Mathew
Publication year - 2005
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2062943
Subject(s) - x ray photoelectron spectroscopy , photoelectric effect , materials science , spectral line , dielectric , analytical chemistry (journal) , penetration depth , computational physics , chemistry , optics , optoelectronics , physics , nuclear magnetic resonance , chromatography , astronomy
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