Open AccessComment on “Ion energy uniformity in high-frequency capacitive discharges” [Appl. Phys. Lett. 86, 021501 (2005)]
Author(s) -
A.A. Howling,
L. Sansonnens,
Harald Schmidt,
Ch. Hollenstein
Publication year - 2005
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.2012528
Subject(s) - capacitive sensing , ion , materials science , atomic physics , energy (signal processing) , optoelectronics , physics , condensed matter physics , electrical engineering , quantum mechanics , engineering
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