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Many experiments on the mechanics of nanostructures require the creation of rigid clamps at specific locations. In this work, electron-beam-induced deposition (EBID) has been used to deposit carbon films that are similar to those that have recently been used for clamping nanostructures. The film deposition rate was accelerated by placing a paraffin source of hydrocarbon near the area where the EBID deposits were made. High-resolution transmission electron microscopy, electron-energy-loss spectroscopy, Raman spectroscopy, secondary-ion-mass spectrometry, and nanoindentation were used to characterize the chemical composition and the mechanics of the carbonaceous deposits. The typical EBID deposit was found to be hydrogenated amorphous carbon (a-C:H) having more sp2- than sp3-bonded carbon. Nanoindentation tests revealed a hardness of ∼4GPa and an elastic modulus of 30–60GPa, depending on the accelerating voltage. This reflects a relatively soft film, which is built out of precursor molecular ions impacting ...

Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor