Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor | Zendy

Weiqiang Ding | Zendy; Dmitriy A. Dikin | Zendy; X. Chen | Zendy; Richard D. Piner | Zendy; Rodney S. Ruoff | Zendy; Eyal Zussman | Zendy; X. Wang | Zendy; Xiao Li | Zendy

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Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor

Author(s) -

Weiqiang Ding,

Dmitriy A. Dikin,

X. Chen,

Richard D. Piner,

Rodney S. Ruoff,

Eyal Zussman,

X. Wang,

Xiao Li

Publication year - 2005

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/1.1940138

Subject(s) - nanoindentation , amorphous carbon , materials science , electron beam induced deposition , electron energy loss spectroscopy , carbon fibers , transmission electron microscopy , chemical engineering , focused ion beam , graphene , raman spectroscopy , carbon film , composite material , carbon nanofiber , amorphous solid , nanotechnology , carbon nanotube , thin film , chemistry , ion , scanning transmission electron microscopy , crystallography , organic chemistry , optics , physics , composite number , engineering

Many experiments on the mechanics of nanostructures require the creation of rigid clamps at specific locations. In this work, electron-beam-induced deposition (EBID) has been used to deposit carbon films that are similar to those that have recently been used for clamping nanostructures. The film deposition rate was accelerated by placing a paraffin source of hydrocarbon near the area where the EBID deposits were made. High-resolution transmission electron microscopy, electron-energy-loss spectroscopy, Raman spectroscopy, secondary-ion-mass spectrometry, and nanoindentation were used to characterize the chemical composition and the mechanics of the carbonaceous deposits. The typical EBID deposit was found to be hydrogenated amorphous carbon (a-C:H) having more sp2- than sp3-bonded carbon. Nanoindentation tests revealed a hardness of ∼4GPa and an elastic modulus of 30–60GPa, depending on the accelerating voltage. This reflects a relatively soft film, which is built out of precursor molecular ions impacting ...

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