Diffracted moiré fringes as analysis and alignment tools for multilayer fabrication in soft lithography | Zendy

JaeHwang Lee | Zendy; Chang-Hwan Kim | Zendy; YongSung Kim | Zendy; KaiMing Ho | Zendy; Kristen Constant | Zendy; Wai Leung | Zendy; ChaHwan Oh | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Diffracted moiré fringes as analysis and alignment tools for multilayer fabrication in soft lithography

Author(s) -

JaeHwang Lee,

Chang-Hwan Kim,

YongSung Kim,

KaiMing Ho,

Kristen Constant,

Wai Leung,

ChaHwan Oh

Publication year - 2005

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.1927268

Subject(s) - moiré pattern , diffraction , optics , materials science , microfabrication , lithography , layer (electronics) , fabrication , soft lithography , photolithography , optoelectronics , physics , nanotechnology , medicine , alternative medicine , pathology

We studied the first-order diffracted moire fringes of transparent multilayered structures comprised of irregularly deformed periodic patterns. By a comparison study of the diffracted moire fringe pattern and detailed microscopy of the structure, we show that the diffracted moire fringe can be used as a nondestructive tool to analyze the alignment of multilayered structures. We demonstrate the alignment method for the case of layer-by-layer microstructures using soft lithography. The alignment method yields high contrast of fringes even when the materials being aligned have very weak contrasts. The imaging method of diffracted moire fringes is a versatile visual tool for the microfabrication of transparent deformable microstructures in layer-by-layer fashion.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research