A Fabry–Perot interferometer for micrometer-sized cantilevers | Zendy

Bart W. Hoogenboom | Zendy; P. L. T. M. Frederix | Zendy; Jinling Yang | Zendy; S. Martin | Zendy; Y. Pellmont | Zendy; M. Steinacher | Zendy; Shlomo Zach | Zendy; E. Langenbach | Zendy; Hans-Joerg Heimbeck | Zendy; Andreas Engel | Zendy; Hans J. Hug | Zendy

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A Fabry–Perot interferometer for micrometer-sized cantilevers

Author(s) -

Bart W. Hoogenboom,

P. L. T. M. Frederix,

Jinling Yang,

S. Martin,

Y. Pellmont,

M. Steinacher,

Shlomo Zach,

E. Langenbach,

Hans-Joerg Heimbeck,

Andreas Engel,

Hans J. Hug

Publication year - 2005

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.1866229

Subject(s) - cantilever , interferometry , fabry–pérot interferometer , optics , deflection (physics) , micrometer , materials science , detector , astronomical interferometer , optoelectronics , physics , wavelength , composite material

We have developed a Fabry–Perot interferometer detecting the deflection of micrometer-sized cantilevers and other micromechanical devices, at a working distance of 0.8mm. At 1MHz, a noise floor of 1fm∕Hz is obtained. The detector is mounted on a piezo motor for three-axis alignment. The angular alignment is not critical. The interferometer can be operated in vacuum, air, and liquid. It is particularly suited for scanning force microscopy with small cantilevers, or with larger cantilevers simultaneously monitoring vertical and lateral forces.

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