Open AccessMagnetic properties of electroplated nano/microgranular NiFe thin films for rf application
Author(s) -
Yan Zhuang,
M. Vroubel,
B. Rejaei,
Joachim N. Burghartz,
K. Attenborough
Publication year - 2005
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.1857391
Subject(s) - materials science , ferromagnetic resonance , magnetic anisotropy , thin film , electroplating , magnetic force microscope , inductor , optoelectronics , permeability (electromagnetism) , ferromagnetism , radio frequency , solenoid , nuclear magnetic resonance , condensed matter physics , magnetic field , composite material , magnetization , nanotechnology , chemistry , layer (electronics) , electrical engineering , biochemistry , quantum mechanics , voltage , membrane , physics , engineering
A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (? ? 1.0??m). Nanonuclei (? ? 30–50?nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ? 50?mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency ( ? 5.5?GHz) with a maximum quality factor ( ? 3).Electrical Engineering, Mathematics and Computer Scienc
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