A small, linear, piezoelectric ultrasonic cryomotor | Zendy

Shuxiang Dong | Zendy; Yan Li | Zendy; Naigang Wang | Zendy; D. Viehland | Zendy; Xiaoning Jiang | Zendy; Paul W. Rehrig | Zendy; Wes Hackenberger | Zendy

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A small, linear, piezoelectric ultrasonic cryomotor

Author(s) -

Shuxiang Dong,

Yan Li,

Naigang Wang,

D. Viehland,

Xiaoning Jiang,

Paul W. Rehrig,

Wes Hackenberger

Publication year - 2005

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.1855424

Subject(s) - ultrasonic motor , piezoelectricity , slider , stator , materials science , ultrasonic sensor , linear motor , bending , acoustics , piezoelectric motor , linear motion , excited state , physics , composite material , mechanical engineering , engineering , atomic physics

A small, linear-type, piezoelectric ultrasonic cryomotor has been developed for precision positioning at extremely low temperatures (⩾−200°C). This cryomotor consists of a pair of Pb(Mg1∕3Nb2∕3)O3−PbTiO3 single crystal stacks, which are piezoelectrically excited into the rotating third-bending mode of the cryomotor stator’s center, which in turn drives a contacted slider into linear motion via frictional forces. The performance characteristics achieved by the cryomotor are: (i) a maximum linear speed of >50mm∕s; (ii) a stroke of >10mm; (iii) a driving force of >0.2N; (iv) a response time of ∼29ms; and (v) a step resolution of ∼20nm.

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