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A differential mechanical profilometer for thickness measurement
Author(s) -
J. Maia Alves,
M.C. Brito,
J.M. Serra,
A.M. Vallêra
Publication year - 2004
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1821627
Subject(s) - profilometer , transducer , materials science , optics , displacement (psychology) , differential (mechanical device) , differential pressure , measure (data warehouse) , sensitivity (control systems) , sample (material) , acoustics , composite material , surface finish , computer science , physics , electronic engineering , mechanics , psychology , psychotherapist , thermodynamics , database , engineering
A low cost differential profilometer based on standard commercial displacement transducers is fully described. Unlike most common profilometers this device can be used to measure the thickness profile of samples having both surfaces irregular. A sensitivity of about 0.2 μm, independent of the sample thickness is achieved.

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