Thermophoretic control of building units in the plasma-assisted deposition of nanostructured carbon films | Zendy

P.P. Rutkevych | Zendy; Kostya Ostrikov | Zendy; Sai Xu | Zendy; S. V. Vladimirov | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Thermophoretic control of building units in the plasma-assisted deposition of nanostructured carbon films

Author(s) -

P.P. Rutkevych,

Kostya Ostrikov,

Sai Xu,

S. V. Vladimirov

Publication year - 2004

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/1.1791761

Subject(s) - nanoparticle , carbon fibers , deposition (geology) , plasma , materials science , carbon nanoparticles , chemical engineering , nanostructure , nanotechnology , substrate (aquarium) , carbon film , thin film , composite material , paleontology , oceanography , physics , quantum mechanics , sediment , geology , composite number , engineering , biology

The role of the plasma-grown nanoparticles in the plasma-enhanced chemical vapor deposition (PECVD) of the nanostructured carbon-based films was investigated. The samples were grown in the low-pressure rf plasmas of CH 4+H2+Ar gas mixtures. The enhanced deposition of the building units from the gas phase was found to support the formation of polymorphous nanostructured carbon films. The results reveal the crucial role played by the thermophoretic force in controlling the deposition of the plasma-grown fine particles

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research