Open AccessComment on ``Sputtering Ion Source for Solids''
Author(s) -
Harold P. Smith
Publication year - 1964
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.1713180
Subject(s) - sputtering , ion , materials science , chemistry , thin film , nanotechnology , organic chemistry
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