Open AccessComments on ``Computer Simulation of Sputtering''
Author(s) -
Mark T. Robinson
Publication year - 1969
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.1658052
Subject(s) - sputtering , computer science , computer graphics (images) , materials science , nanotechnology , thin film
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