Open AccessPatterned growth of single-walled carbon nanotube arrays from a vapor-deposited Fe catalyst
Author(s) -
Haibing Peng,
Trygve Ristroph,
G. Schürmann,
Gavin M. King,
Ji Hyun Yoon,
V. Narayanamurti,
J. A. Golovchenko
Publication year - 2003
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.1627935
Subject(s) - carbon nanotube , materials science , chemical vapor deposition , nanotechnology , fabrication , catalysis , nanotube , nanometre , carbon nanotube supported catalyst , vacuum deposition , electrode , semiconductor , chemical engineering , thin film , optoelectronics , carbon nanofiber , composite material , chemistry , organic chemistry , medicine , alternative medicine , pathology , engineering
Single-walled carbon nanotubes have been grown on a variety of substrates by chemical vapor deposition using low-coverage vacuum-deposited iron as a catalyst. Ordered arrays of suspended nanotubes ranging from submicron to several micron lengths have been obtained on Si, SiO 2 , Al 2 O 3 , and Si 3 N 4 substrates that were patterned on hundred nanometer length scales with a focused ion beam machine. Electric fields applied during nanotube growth allow the control of growth direction. Nanotube circuits have been constructed directly on contacting metal electrodes of Pt/Cr patterned with catalysts. Patterning with solid iron catalyst is compatible with modern semiconductor fabrication strategies and may contribute to the integration of nanotubes in complex device architectures.
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