Fiber Optic Fourier Transform Infrared Spectroscopic Techniques for Advanced On-Line Chemical Analysis in Semiconductor Fabrication Tools

A unique analytical methodology has recently been developed to perform real‐time, on‐line chemical analysis of bath solutions in semiconductor fabrication tools. A novel, patented fiber optic sensor is used to transmit infrared light directly through the tube walls of the circulating bath solutions within the fabrication tool in a completely non‐invasive, non‐extractive way. The sensor simply “clips” onto the tubing, thus permitting immediate analysis of the bath composition by Fourier Transform infrared (FTIR) spectroscopy. The infrared spectrometer is capable of multiplexing up to eight “Clippir™” sensor heads to a single interferometer using fiber optic cables. The instrument can analyze almost any bath solution utilized today. The analysis is performed using the near‐infrared (NIR) portion of the electromagnetic spectrum, where absorption bands related to molecular vibrations can be found. The Fourier Transform infrared spectrometer gives access to absorption bands over a wide range of frequencies (or...