Open AccessCarrier Illumination as a tool to probe implant dose and electrical activation
Author(s) -
W. Vandervorst
Publication year - 2003
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1622556
Subject(s) - dopant activation , dopant , materials science , annealing (glass) , sheet resistance , optoelectronics , ion implantation , signal (programming language) , amorphous solid , spreading resistance profiling , implant , silicon , analytical chemistry (journal) , doping , ion , nanotechnology , composite material , chemistry , computer science , medicine , surgery , organic chemistry , layer (electronics) , chromatography , programming language
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