Transmission Electron Microscopy: Overview and Challenges | Zendy

S. J. Pennycook | Zendy

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Transmission Electron Microscopy: Overview and Challenges

Author(s) -

S. J. Pennycook

Publication year - 2003

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.1622537

Subject(s) - transmission electron microscopy , scanning transmission electron microscopy , materials science , spectroscopy , energy filtered transmission electron microscopy , transmission (telecommunications) , sensitivity (control systems) , microscopy , nanotechnology , scanning confocal electron microscopy , optics , optoelectronics , computer science , electronic engineering , physics , telecommunications , engineering , quantum mechanics

We review recent advances in aberration-corrected scanning transmission electron microscopy that allow sub-Ångstrom beams to be used for imaging and spectroscopy, with enormous improvement in sensitivity for single atom detection and the investigation of interfacial electronic structure. Comparison is made between the electronic and structural width of gate oxides, with interpretation through first-principles theory. Future developments are discussed.

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