Open AccessNanoindentation Study of the Mechanical Behavior of Silicon Nano-springs
Author(s) -
Bin Li
Publication year - 2003
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1622522
Subject(s) - nanoindentation , silicon , materials science , nano , composite material , spring (device) , nanoscopic scale , deformation (meteorology) , nanometre , nanotechnology , structural engineering , optoelectronics , engineering
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