Open AccessCharacterization of SiGe Bulk Compositional Standards with Electron Probe Microanalysis
Author(s) -
Ryna B. Marinenko
Publication year - 2003
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.1622478
Subject(s) - electron microprobe , microelectronics , characterization (materials science) , materials science , wafer , electron probe microanalysis , microanalysis , analytical chemistry (journal) , thin film , optoelectronics , metallurgy , nanotechnology , chemistry , organic chemistry , chromatography
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