Open AccessSuperhard self-lubricating AlMgB14 films for microelectromechanical devices
Author(s) -
Yun Tian,
A.F. Bastawros,
C. C. H. Lo,
Alan P. Constant,
A.M. Russell,
B. A. Cook
Publication year - 2003
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.1615677
Subject(s) - materials science , nanoindentation , liga , amorphous solid , microelectromechanical systems , thin film , substrate (aquarium) , composite material , nanotechnology , fabrication , optoelectronics , metallurgy , crystallography , medicine , chemistry , alternative medicine , oceanography , pathology , geology
Performance and reliability of microelectromechanical system (MEMS) components can be enhanced dramatically through the incorporation of protective thin-film coatings. Current-generation MEMS devices prepared by the lithographie-galvanoformung-abformung (LIGA) technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high-temperature environments. Fabrication of a superhard self-lubricating coating based on a ternary boride compound AlMgB14 described in this letter has great potential in protective coating technology for LIGA microdevices. Nanoindentation tests show that the hardness of AlMgB14 films prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04–0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgB14 films. Transmission electron microscopy st...
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