Open AccessA new type of fiber-optic-based interferometric ellipsometer for in situ and real-time measurements
Author(s) -
S. Topçu,
Luc Chassagne,
Yasser Alayli
Publication year - 2003
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1606118
Subject(s) - interferometry , optics , beam splitter , ellipsometry , optical fiber , in situ , pockels effect , materials science , beat (acoustics) , collimated light , sample (material) , physics , laser , thin film , meteorology , nanotechnology , thermodynamics
International audienceIt is shown that it is possible to improve interferometric ellipsometers by using a Pockels cell or a Bragg cell hence avoiding the use of any moving components. Furthermore, these methods allow one to increase the beat frequency signal permitting a better insensitiveness to mechanical disturbances. It is also shown how to incorporate an optical fiber between the neutral beam splitter and the sample without losing any information concerning the ellipsometric angles of the sample. Several configurations are described and theoretically analyzed. The last ones do not contain any active component around the sample. They offer a new measurement technique for real-time and in situ measurements