Open AccessGettering of Pd to implantation-induced nanocavities in Si
Author(s) -
D. A. Brett,
G. de M. Azevedo,
David J. Llewellyn,
M. C. Ridgway
Publication year - 2003
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.1597424
Subject(s) - getter , annealing (glass) , materials science , transmission electron microscopy , silicide , silicon , ion implantation , radiochemistry , optoelectronics , metallurgy , analytical chemistry (journal) , chemistry , nanotechnology , ion , organic chemistry , chromatography
The authors thank the Australian Research Council for their financial support. G.deM.A. acknowledges the Brazilian agency CNPq ~Conselho Nacional de Desenvolvimento Cienti´fico e Tecnolo´gico! for a postdoctoral fellowship.
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