Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems | Zendy

Torben M. Hansen | Zendy; Kurt Stokbro | Zendy; Ole Hansen | Zendy; Tue Hassenkam | Zendy; Ichiro Shiraki | Zendy; Shuji Hasegawa | Zendy; Peter Bøggild | Zendy

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Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems

Author(s) -

Torben M. Hansen,

Kurt Stokbro,

Ole Hansen,

Tue Hassenkam,

Ichiro Shiraki,

Shuji Hasegawa,

Peter Bøggild

Publication year - 2003

Publication title -

review of scientific instruments

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.605

H-Index - 165

eISSN - 1089-7623

pISSN - 0034-6748

DOI - 10.1063/1.1589161

Subject(s) - resolution (logic) , materials science , electrode , conductance , point (geometry) , voltage , image resolution , grid , optics , conductivity , analytical chemistry (journal) , computer science , physics , chemistry , mathematics , geometry , artificial intelligence , chromatography , quantum mechanics , condensed matter physics

A method to improve the resolution of four-point-probe measurements of two-dimensional (2D) and quasi-2D systems is presented. By mapping the conductance on a dense grid around a target area and postprocessing the data, the resolution can be improved by a factor of approximately 50 to better than 1/15 of the four-point-probe electrode spacing. The real conductance sheet is simulated by a grid of discrete resistances, which is optimized by means of a standard optimization algorithm, until the simulated voltage-to-current ratios converges with the measurement. The method has been tested against simulated data as well as real measurements and is found to successfully deconvolute the four-point-probe measurements. In conjunction with a newly developed scanning four-point probe with electrode spacing of 1.1 μm, the method can resolve the conductivity with submicron resolution.

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