Effect of annealing environment on the memory properties of thin oxides with embedded Si nanocrystals obtained by low-energy ion-beam synthesis
Author(s) -
P. Normand,
E. Kapetanakis,
Panagiotis Dimitrakis,
D. Tsoukalas,
K. Beltsios,
N. Cherkashin,
C. Bonafos,
G. Benassayag,
H. Coffin,
A. Claverie,
V. Soncini,
Aditya Agarwal,
Mike Ameen
Publication year - 2003
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.1588378
Subject(s) - materials science , annealing (glass) , silicon , optoelectronics , ion implantation , nanocrystal , oxide , silicon dioxide , thin film , capacitor , fabrication , inert , nanotechnology , ion , voltage , composite material , metallurgy , chemistry , electrical engineering , medicine , alternative medicine , organic chemistry , engineering , pathology
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