Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films | Zendy

Rajagopalan Thiruvengadathan | Zendy; Bashar Lahlouh | Zendy; Jorge Lubguban | Zendy; N. Biswas | Zendy; S. Gangopadhyay | Zendy; Jinfeng Sun | Zendy; Dinghai Huang | Zendy; Sindee L. Simon | Zendy; Anupama Mallikarjunan | Zendy; H.-C. Kim | Zendy; Willi Volksen | Zendy; Michael F. Toney | Zendy; E. Huang | Zendy; Phil Rice | Zendy; Eugene Delenia | Zendy; R. Miller | Zendy

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Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films

Author(s) -

Rajagopalan Thiruvengadathan,

Bashar Lahlouh,

Jorge Lubguban,

N. Biswas,

S. Gangopadhyay,

Jinfeng Sun,

Dinghai Huang,

Sindee L. Simon,

Anupama Mallikarjunan,

H.-C. Kim,

Willi Volksen,

Michael F. Toney,

E. Huang,

Phil Rice,

Eugene Delenia,

R. Miller

Publication year - 2003

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.1583139

Subject(s) - materials science , dielectric , supercritical carbon dioxide , nanoporous , supercritical fluid extraction , supercritical fluid , fourier transform infrared spectroscopy , chemical engineering , thermal decomposition , extraction (chemistry) , analytical chemistry (journal) , organic chemistry , nanotechnology , chemistry , optoelectronics , engineering

Supercritical carbon dioxide (SCCO2) extraction of a CO2-soluble poly(propylene glycol) (PPG) porogen from poly(methylsilsesquioxane) (PMSSQ) cured to temperatures adequate to initiate matrix condensation, but still below the decomposition temperature of the porogen is demonstrated to produce nanoporous, ultralow dielectric constant thin films. Both closed and open cell porous structures were prepared simply by varying the porogen load in the organic/inorganic hybrid films. The porogen loads investigated in the present work ranged from 25 - 55 wt.%. Structural characterization of the samples conducted using transmission electron microscope (TEM), small angle X-ray scattering (SAXS) and Fourier transform infrared spectroscopy (FTIR) confirms the successful extraction of the porogen from the PMSSQ matrix at relatively low temperatures (≤200oC). The standard thermal decomposition process is performed at much higher temperatures (typically in the range of 400oC-450oC). The values of dielectric constants and refractive indices measured are in good agreement with the structural properties of

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