Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas | Zendy

Kostya Ostrikov | Zendy; E. L. Tsakadze | Zendy; Shaohui Xu | Zendy; S. V. Vladimirov | Zendy; R. G. Storer | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

Author(s) -

Kostya Ostrikov,

E. L. Tsakadze,

Shaohui Xu,

S. V. Vladimirov,

R. G. Storer

Publication year - 2003

Publication title -

physics of plasmas

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.75

H-Index - 160

eISSN - 1089-7674

pISSN - 1070-664X

DOI - 10.1063/1.1557871

Subject(s) - physics , harmonics , magnetic field , plasma , harmonic , inductively coupled plasma , azimuth , nonlinear system , electromagnetic field , atomic physics , computational physics , radio frequency , optics , voltage , acoustics , quantum mechanics , electrical engineering , engineering

Radial profiles of magnetic fields in the electrostatic (E) and electromagnetic (H) modes of low-frequency (∼500) inductively coupled plasmas (ICP) were measured using miniature magnetic probes. A simplified plasma fluid model explaining the generation of the second harmonics of the azimuthal magnetic field in the plasma source was proposed. Because of apparent similarity in the procedure of derivation of the pondermotive force-caused nonlinear terms, pronounced generation of the nonlinear static azimuthal magnetic field could be expected.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research