Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna

A radio frequency (rf) plasma is created at low pressure (∼1 mTorr) in the source tube of a “helicon” excited diffusion system in the absence of a dc magnetic field. The coupling is capacitive for the low source power of 160 W at 13.56 MHz considered here. Temperature measurements of the glass source tube yield a plasma power deposition of ∼35 W. The plasma parameters (density, potential, electron temperature) were measured using a retarding field energy analyzer. An analytical model based on the measured plasma parameters and on additional external parameters measured in the matching box (rf voltages and phase, rf current) is developed. The model takes into account the geometry of the double saddle rf antenna. It is found that the inside of the glass wall adjacent to the antenna wire charges negatively. Ion acceleration into the glass along the antenna and fast electrons escaping the plasma account for most of the power deposition to the walls (∼16.8 W). Secondary electrons liberated by ions impinging on...