Open Accessm-line spectroscopy for optical analysis of thick LiNbO3 layers grown on sapphire substrates by radio-frequency multistep sputtering
Author(s) -
El Hadj Dogheche,
X. Lansiaux,
Denis Rémiens
Publication year - 2003
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.1530367
Subject(s) - materials science , sapphire , sputter deposition , lithium niobate , sputtering , spectroscopy , epitaxy , surface roughness , optics , microstructure , optoelectronics , optical microscope , substrate (aquarium) , surface finish , thin film , layer (electronics) , composite material , laser , scanning electron microscope , nanotechnology , quantum mechanics , geology , oceanography , physics
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