Open AccessFiguring with subnanometer-level accuracy by numerically controlled elastic emission machining
Author(s) -
Kazuto Yamauchi,
Hidekazu Mimura,
Kouji Inagaki,
Yuzo Mori
Publication year - 2002
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.1510573
Subject(s) - figuring , nozzle , machining , materials science , optics , ultrapure water , wavelength , aperture (computer memory) , image resolution , range (aeronautics) , composite material , optoelectronics , acoustics , nanotechnology , mechanical engineering , physics , metallurgy , engineering
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