Electron field emission from excimer laser crystallized amorphous silicon
Author(s) -
Y. F. Tang,
S. Ravi P. Silva,
Bojan O. Boskovic,
J. M. Shan,
M.J. Rose
Publication year - 2002
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.1482141
Subject(s) - materials science , field electron emission , excimer laser , silicon , amorphous silicon , optoelectronics , laser , diode , substrate (aquarium) , amorphous solid , field emission display , optics , electron , crystalline silicon , chemistry , crystallography , oceanography , physics , quantum mechanics , geology
We show field emission from excimer laser crystallized (ELC) hydrogenated amorphous silicon (a-Si:H) at current densities and threshold fields suitable for display applications. The laser crystallized a-Si:H gives rise to a densely packed and relative sharp surface morphology that gives emission currents of the order of 10−5 A (current densities≈0.04 A/cm2) at threshold fields less than 15 V/μm in a diode configuration, without the need for a forming process. With the progress in utilizing ELC in flat panel driver electronics, a fully integrated field emission display on a single glass substrate can now be envisaged.
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