Open AccessErratum: “Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors” [Appl. Phys. Lett. 80, 1580 (2002)]
Author(s) -
T. C. Shen,
JeongYoung Ji,
M. A. Zudov,
Rui-Rui Du,
Jeffrey S. Kline,
J. R. Tucker
Publication year - 2002
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.1476066
Subject(s) - silicon , materials science , optoelectronics , chemistry , crystallography , condensed matter physics , physics
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